- UHRA Home
- Browsing by Author
Browsing by Author "Defforge, Thomas"
Now showing items 1-4 of 4
-
Copper Electrochemical Deposition in Macroporous Silicon Arrays for Through Silicon Via Applications
Defforge, Thomas; Coudron, Loic; Gautier, Gael; Grimal, Virginie; Ventura, Laurent; Tran Van, Francois (Institute of Electrical and Electronics Engineers (IEEE), 2011)The present paper deals with the realization of high conductivity through silicon via from macroporous silicon arrays. The pores were first etched by anodization into a hydrofluoric acid mixture. The high aspect ratio via ... -
Effect of low temperature and concentration KOH etching on high aspect ratio silicon structures
Defforge, Thomas; Coudron, L.; Gautier, Gael; Kouassi, Sebastien; Vervisch, Wilfried; Tran Van, Francois; Ventura, Laurent (2011)In this paper, the effect of low concentrated alkaline solutions etching on texturized silicon structures at low temperatures has been studied. The silicon samples have been previously etched either from regular arrays by ... -
Metal-Free Disordered Vertical Sub-Micron Silicon Wires Produced from Electrochemical p-Type Porous Silicon Layers
Gautier, Gael; Defforge, Thomas; Kouassi, Sebastien; Coudron, L. (2011)In this paper, we propose a simple, original and costless method to produce monocrystalline silicon sub-micron wires by electrochemical etching of silicon wafers. For this purpose, 30-50 Omega cm p-type silicon samples ... -
Thick Microporous Silicon Layers Etching Involving p(+)n Back Side Hole Injection in Highly Resistive n-Type Substrates
Coudron, Loic; Gautier, Gael; Morillon, Benjamin; Kouassi, Sebastien; Defforge, Thomas; Ventura, Laurent (2011)Anodization studies on low-doped n-type silicon in aqueous electrolytes have systematically shown the formation of macropores. In this paper, we show the possibility to produce microporous silicon in low-doped n-type ...