Browsing Research publications by Author "Tran Van, Francois"
Now showing items 1-2 of 2
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Copper Electrochemical Deposition in Macroporous Silicon Arrays for Through Silicon Via Applications
Defforge, Thomas; Coudron, Loic; Gautier, Gael; Grimal, Virginie; Ventura, Laurent; Tran Van, Francois (Institute of Electrical and Electronics Engineers (IEEE), 2011)The present paper deals with the realization of high conductivity through silicon via from macroporous silicon arrays. The pores were first etched by anodization into a hydrofluoric acid mixture. The high aspect ratio via ... -
Effect of low temperature and concentration KOH etching on high aspect ratio silicon structures
Defforge, Thomas; Coudron, L.; Gautier, Gael; Kouassi, Sebastien; Vervisch, Wilfried; Tran Van, Francois; Ventura, Laurent (2011)In this paper, the effect of low concentrated alkaline solutions etching on texturized silicon structures at low temperatures has been studied. The silicon samples have been previously etched either from regular arrays by ...