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A silicon micromachined device for use in blood cell deformability studies
An application of silicon micromachining to the analysis of blood cell theology is described. The system, based upon a micromachined flow cell, provides a specific measurement of each cell in a statistically significant ...
The production of precision silicon micromachined non-spherical particles for aerosol studies
A variety of accurately defined non-spherical particles have been produced in silicon dioxide and polycrystalline silicon using the process of silicon micromachining. The particles are of lengths 3μm, 4.5μm, 7.5μm, and ...