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Browsing by Author "Gundlach, A.M."
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The production of precision silicon micromachined non-spherical particles for aerosol studies
Kaye, Paul H.; Micheli, F.; Tracey, M.C.; Hirst, E.; Gundlach, A.M. (1992)A variety of accurately defined non-spherical particles have been produced in silicon dioxide and polycrystalline silicon using the process of silicon micromachining. The particles are of lengths 3μm, 4.5μm, 7.5μm, and ...