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        Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices

        Author
        Khoshnoud, Farbod
        de Silva, Clarence W.
        Attention
        2299/11796
        Abstract
        This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.
        Publication date
        2012-06
        Published in
        Instrumentation and Measurement Magazine
        Published version
        https://doi.org/10.1109/MIM.2012.6204868
        Other links
        http://hdl.handle.net/2299/11796
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