Now showing items 1-1 of 1

    • Dynamic optical characterization of NEMS resonators 

      Coudron, L.; Casset, F.; Durand, C.; Renaux, P.; Ollier, E.; Bloch, D.; Vairac, P. (IEEE COMPUTER SOC, 2008)
      The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But ...