Browsing Research publications by Author "Ochsner, Andreas"
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Macroporous Silicon Electrochemical Etching for Gas Diffusion Layers Applications : Effect of Processing Temperature
Kouassi, Sebastien; Gautier, Gael; Desplobain, Sebastien; Coudron, L.; Ventura, Laurent (2010)MEMS technology requires low cost techniques to permit large scale fabrication for production. Porous silicon (PS) can be used in different manner to replace standard expensive etching techniques like DRIE (Deep Reactive ...