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dc.contributor.authorKouassi, Sebastien
dc.contributor.authorGautier, Gael
dc.contributor.authorDesplobain, Sebastien
dc.contributor.authorCoudron, L.
dc.contributor.authorVentura, Laurent
dc.contributor.editorOchsner, Andreas
dc.contributor.editorMurch, Graeme E.
dc.contributor.editorShokuhfar, Ali
dc.contributor.editorDelgado, Joao M. P. Q.
dc.identifier.citationKouassi , S , Gautier , G , Desplobain , S , Coudron , L & Ventura , L 2010 , Macroporous Silicon Electrochemical Etching for Gas Diffusion Layers Applications : Effect of Processing Temperature . in A Ochsner , G E Murch , A Shokuhfar & J M P Q Delgado (eds) , Defect and Diffusion Forum : Diffusion in Solids and Liquids V . vol. 297 , pp. 887-892 .
dc.identifier.otherPURE: 680330
dc.identifier.otherPURE UUID: 06c5795a-a257-4aa5-8d8e-8b3e94cbbd0a
dc.identifier.otherBibtex: urn:00d0c88ec556eff5926c793e2ead03e7
dc.identifier.otherScopus: 77952277815
dc.description.abstractMEMS technology requires low cost techniques to permit large scale fabrication for production. Porous silicon (PS) can be used in different manner to replace standard expensive etching techniques like DRIE (Deep Reactive Ion Etching). To perform same process quality as the latter, one need to understand how different parameters can influence porous silicon properties. We investigate here local formation of macroporous silicon on 2D and 3D silicon substrates. The blank substrate is a low doped (26–33 Ω cm) n type 6 inches silicon wafer. Then, an in situ phosphorus-doped polycrystalline silicon (N+ Poly-Si) is deposited on a thermal oxide layer to delimit the regions to be etched. Porous silicon is obtained afterwards using electrochemical anodization in a hydrofluoric acid (HF) solution. The effect of the temperature process on Si-HF electrochemical system voltamperometric curves, macropores morphology and electrochemical etch rates is more specifically studied. Moreover, permeation of porous substrates to hydrogen is studied after various anodization post-treatments such as KOH and HF wet etching or after a thin gold layer deposition used as current collector in micro fuel cells.en
dc.relation.ispartofDefect and Diffusion Forum
dc.titleMacroporous Silicon Electrochemical Etching for Gas Diffusion Layers Applications : Effect of Processing Temperatureen
dc.contributor.institutionCentre for Research in Biodetection Technologies
dc.contributor.institutionMicrofluidics and Microengineering
dc.contributor.institutionSchool of Physics, Engineering & Computer Science
dc.contributor.institutionDepartment of Engineering and Technology
dc.contributor.institutionCentre for Engineering Research
dc.contributor.institutionMicro Electro-Mechanical Systems
dc.contributor.institutionCentre for Future Societies Research

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