Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices
Khoshnoud, Farbod and de Silva, Clarence W.
(2012)
Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices.
Instrumentation and Measurement Magazine, 15 (3).
pp. 16-20.
This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.
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Date Deposited | 15 May 2025 12:28 |
Last Modified | 30 May 2025 23:51 |
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