Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices

Khoshnoud, Farbod and de Silva, Clarence W. (2012) Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices. Instrumentation and Measurement Magazine, 15 (3). pp. 16-20.
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This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.

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