Publication

Number of items: 1.
2011
  • Effect of low temperature and concentration KOH etching on high aspect ratio silicon structures. (2011) Thomas Defforge, L. Coudron, Gael Gautier, Sebastien Kouassi, Wilfried Vervisch, Francois Tran Van and Laurent Ventura picture_as_pdf
    • This list was generated on Sun Sep 13 02:52:45 2026 BST.