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Thick Microporous Silicon Layers Etching Involving p(+)n Back Side Hole Injection in Highly Resistive n-Type Substrates
Coudron, Loic; Gautier, Gael; Morillon, Benjamin; Kouassi, Sebastien; Defforge, Thomas; Ventura, Laurent (2011)Anodization studies on low-doped n-type silicon in aqueous electrolytes have systematically shown the formation of macropores. In this paper, we show the possibility to produce microporous silicon in low-doped n-type ...