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Effect of low temperature and concentration KOH etching on high aspect ratio silicon structures
Defforge, Thomas; Coudron, L.; Gautier, Gael; Kouassi, Sebastien; Vervisch, Wilfried; Tran Van, Francois; Ventura, Laurent (2011)In this paper, the effect of low concentrated alkaline solutions etching on texturized silicon structures at low temperatures has been studied. The silicon samples have been previously etched either from regular arrays by ...