dc.contributor.author | Defforge, Thomas | |
dc.contributor.author | Coudron, Loic | |
dc.contributor.author | Gautier, Gael | |
dc.contributor.author | Grimal, Virginie | |
dc.contributor.author | Ventura, Laurent | |
dc.contributor.author | Tran Van, Francois | |
dc.date.accessioned | 2013-02-14T08:30:13Z | |
dc.date.available | 2013-02-14T08:30:13Z | |
dc.date.issued | 2011 | |
dc.identifier.citation | Defforge , T , Coudron , L , Gautier , G , Grimal , V , Ventura , L & Tran Van , F 2011 , Copper Electrochemical Deposition in Macroporous Silicon Arrays for Through Silicon Via Applications . in Procs 2011 IEEE Int Interconnect Technology Conference and 2011 Materials for Advanced Metallization : (IITC/MAM) . Institute of Electrical and Electronics Engineers (IEEE) , pp. 1-3 , IEEE International Interconnect Technology Conference and Materials for Advanced Metallization (IITC/MAM) , Dresden , 8/05/11 . https://doi.org/10.1109/IITC.2011.5940336 | |
dc.identifier.citation | conference | |
dc.identifier.isbn | 978-1-4577-0502-1 | |
dc.identifier.uri | http://hdl.handle.net/2299/10015 | |
dc.description.abstract | The present paper deals with the realization of high conductivity through silicon via from macroporous silicon arrays. The pores were first etched by anodization into a hydrofluoric acid mixture. The high aspect ratio via were then filled by an optimized potentiostatic way involving a specific electrolyte with additives. The copper micro-wires were observed by SEM whereas XRD analysis enabled the determination of copper average grain size. | en |
dc.format.extent | 3 | |
dc.language.iso | eng | |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | |
dc.relation.ispartof | Procs 2011 IEEE Int Interconnect Technology Conference and 2011 Materials for Advanced Metallization | |
dc.title | Copper Electrochemical Deposition in Macroporous Silicon Arrays for Through Silicon Via Applications | en |
dc.contributor.institution | Microfluidics and Microengineering | |
dc.contributor.institution | Centre for Engineering Research | |
dc.contributor.institution | Centre for Research in Biodetection Technologies | |
dc.contributor.institution | School of Physics, Engineering & Computer Science | |
dc.contributor.institution | Department of Engineering and Technology | |
dc.contributor.institution | BioEngineering | |
dc.contributor.institution | Micro Electro-Mechanical Systems | |
dc.contributor.institution | Centre for Future Societies Research | |
rioxxterms.versionofrecord | 10.1109/IITC.2011.5940336 | |
rioxxterms.type | Other | |
herts.preservation.rarelyaccessed | true | |