dc.contributor.author | Khoshnoud, Farbod | |
dc.contributor.author | de Silva, Clarence W. | |
dc.date.accessioned | 2013-10-17T10:00:47Z | |
dc.date.available | 2013-10-17T10:00:47Z | |
dc.date.issued | 2012-06 | |
dc.identifier.citation | Khoshnoud , F & de Silva , C W 2012 , ' Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices ' , Instrumentation and Measurement Magazine , vol. 15 , no. 3 , pp. 16-20 . https://doi.org/10.1109/MIM.2012.6204868 | |
dc.identifier.uri | http://hdl.handle.net/2299/11796 | |
dc.description.abstract | This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection. | en |
dc.format.extent | 5 | |
dc.format.extent | 252021 | |
dc.language.iso | eng | |
dc.relation.ispartof | Instrumentation and Measurement Magazine | |
dc.title | Recent Advances in MEMS Sensor Technology : Thermo-fluid and Electro-magnetic Devices | en |
dc.contributor.institution | School of Engineering and Technology | |
dc.contributor.institution | Science & Technology Research Institute | |
dc.contributor.institution | Sustainable Energy Technologies | |
dc.contributor.institution | Centre for Engineering Research | |
dc.description.status | Peer reviewed | |
rioxxterms.versionofrecord | 10.1109/MIM.2012.6204868 | |
rioxxterms.type | Journal Article/Review | |
herts.preservation.rarelyaccessed | true | |